Micro and Nano Engineering


Computer-Aided Simulation of Packaging Reliability


NanoEngineered Systems and Transport


Smart Materials' Advanced Research & Technology (SMART) Laboratory

Micro and Nano Engineering encompasses fabrication, characterization, design and modeling of small structures and devices, and their integration into engineered systems. When dimensions shrink unique properties can result such that the fundamentals of thermo-physical processes deviate from traditional macroscopic behavior.

The Mission of the Group is to create new engineering knowledge and products at the nano- and microscale. The focus of efforts is to explore new nano- and micromanufacturing methods and new material and system properties enabled by nano- and microscale phenomena, educate students about micro- and nanotechnology and identify important problems that can benefit from micro- and nanoengineering.

The research interests of the group are broad including thermal and physical properties of nanostructures (e.g., nanowires, nanotubes, nanoparticles etc.), scalable nanomanufacturing, sensors, fuel cells, thermoelectrics, power systems, microscale medical ultrasound imaging systems, CMOS-MEMS integration, wireless MEMS devices, acoustic and opto-acoustic sensors, nanomechanical devices, biosensors, microfluidics, thermal management of electronics, ion sources for mass spectrometry and scanning probes, and focused electron beam induced deposition for additive nanomanufacturing.

Laboratory facilities include electrochemical synthesis and characterization, chemical vapor deposition, transient and steady-state thermal metrology, RAMAN microscope, impedance spectroscopy, nanoporous materials characterization, Agilent fast GC, Parylene deposition system, sensor characterization tools and AFM microscopes.

Many faculty in the group have joint appointments in the School of Biomedical Engineering, School of Materials Science and Engineering, School of Electrical and Computer Engineering, and in the Petit Institute of Bioengineering and Biosciences.

Academic Faculty

Alexander Alexeev        

Samuel Graham    Matthew McDowell Olivier Pierron

Sourabh Saha    

Research Facilities

  • Clean room for MEMS Fabrication
  • J. Erskine Love Jr. Manufacturing Building
    (Faculty and graduate student offices and labs)
  • Laboratory for the Modification of Nanostructured Interfaces
  • Microelectronics Research Center
  • Nanoscale Thermal Measurement and Manufacturing Laboratory